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Titolo:
A CYLINDRICAL MAGNETRON SPUTTERING SYSTEM FOR DEPOSITING METAL ALUMINUM NITRIDE CERMET SOLAR COATINGS ONTO BATCHES OF TUBES
Autore:
ZHANG QC; ZHAO K; ZHANG BC; WANG LF; SHEN ZL; LU DQ; XIE DL; ZHOU ZJ; LI BF;
Indirizzi:
UNIV SYDNEY,DEPT APPL PHYS SYDNEY NSW 2006 AUSTRALIA BEIJING UNIV,DEPT TECH PHYS BEIJING 100871 PEOPLES R CHINA BEIJING UNIV,DEPT PHYS BEIJING 100871 PEOPLES R CHINA BEIJING TURBOSUN CO BEIJING 100029 PEOPLES R CHINA
Titolo Testata:
Journal of vacuum science & technology. A. Vacuum, surfaces, and films
fascicolo: 2, volume: 16, anno: 1998,
pagine: 628 - 632
SICI:
0734-2101(1998)16:2<628:ACMSSF>2.0.ZU;2-0
Fonte:
ISI
Lingua:
ENG
Soggetto:
SELECTIVE SURFACES; FILM STRUCTURES; OPTICAL-PROPERTIES; THIN-FILMS; EMITTANCE;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
27
Recensione:
Indirizzi per estratti:
Citazione:
Q.C. Zhang et al., "A CYLINDRICAL MAGNETRON SPUTTERING SYSTEM FOR DEPOSITING METAL ALUMINUM NITRIDE CERMET SOLAR COATINGS ONTO BATCHES OF TUBES", Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 628-632

Abstract

A cylindrical direct current (dc) magnetron sputtering system of commercial scale for coating glass tubes with metal-aluminium nitride (M-AlN) cermet solar selective surfaces is described. The stainless steel-aluminium nitride (SS-AlN) cermet material has been investigated as a solar absorbing layer. During the deposition of a SS-AlN cermet layer,both an Al metal target and stainless steel target are sputtered simultaneously in a gas mixture of argon and nitrogen. The nitrogen partial pressure is set sufficiently high at the aluminum target side to ensure that a nearly pure AlN ceramic sublayer is deposited onto the surrounding tubes by dc reactive sputtering. The excellent nitriding resistance of stainless steel leads to a nearly pure SS sublayer being deposited onto the tubes. Tube planetary rotation results in a deposited multi-layered system consisting of alternating SS and AlN sublayers. This multi-sublayer system can be considered as a macro-homogeneous cermet layer with the metal volume fraction determined by controlling the thicknesses of SS and AlN sublayers. Varying the SS target current achieves different SS volume fractions in the cermet layers. Following this procedure the SS-AlN cermet solar selective coatings with a double cermet layer structure were deposited onto 32 borosilicate glass tubesof 37 mm outside diameter and 1.2 m long. A solar absorptance of 0.93-0.95 and emittance of 0.04-0.05 at room temperature has been achieved. (C) 1998 American Vacuum Society.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 25/09/20 alle ore 00:23:38