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Titolo:
PROPERTIES OF (NB1-XTAX)(Z)O-5 SOLID-SOLUTIONS AND (NB1-XTAX)(2)O-5-ZRO2 NANOLAMINATES GROWN BY ATOMIC LAYER EPITAXY
Autore:
KUKLI K; RITALA M; LESKELA M;
Indirizzi:
UNIV HELSINKI,DEPT CHEM,POB 55 FIN-00014 HELSINKI FINLAND
Titolo Testata:
Nanostructured materials
fascicolo: 7, volume: 8, anno: 1997,
pagine: 785 - 793
SICI:
0965-9773(1997)8:7<785:PO(SA(>2.0.ZU;2-1
Fonte:
ISI
Lingua:
ENG
Soggetto:
DIELECTRIC-PROPERTIES; TETRAGONAL ZIRCONIA; THIN-FILMS; NB2O5; TEMPERATURE; DISPLAYS; DRAM;
Tipo documento:
Article
Natura:
Periodico
Citazioni:
32
Recensione:
Indirizzi per estratti:
Citazione:
K. Kukli et al., "PROPERTIES OF (NB1-XTAX)(Z)O-5 SOLID-SOLUTIONS AND (NB1-XTAX)(2)O-5-ZRO2 NANOLAMINATES GROWN BY ATOMIC LAYER EPITAXY", Nanostructured materials, 8(7), 1997, pp. 785-793

Abstract

(Nb1-xTax)(2)O-5 solid solution films and (Nb1-xTax)(2)O-5-ZrO2 nanolaminates have been deposited by Atomic Layer Epitaxy. Amorphous (Nb1-xTax)(2)O-5 films were obtained by sequential pulsing of tantalum and niobium ethoxide and water. The composition of the films was checked byEnergy Dispersive X-ray Spectroscopy (Nb1-xTax)(2)O-5 films exhibited1.6-4 times higher permittivity than that of Ta2O5 films. Leakage currents through the (Nb1-xTax)(2)O-5 films were reduced drastically by adding intermediate ZrO2 layers with thickness of 5-10 nm, i.e. by constructing nanolaminate structures. The ZrO2 interlayers contained nanosize tetragonal ZrO2 crystallites. (C) 1998 Acta Metallurgica Inc.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 21/09/20 alle ore 12:09:41