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Titolo:
LOW-TEMPERATURE SYNTHESIS OF DIAMOND FILMS BY CVD OF COMBINED LASERS
Autore:
FENG ZC; ZHAO Y; ZHANG BC; WANG YQ; WU ZG;
Indirizzi:
CHINESE ACAD SCI,INST MET RES SHENYANG 110015 PEOPLES R CHINA
Titolo Testata:
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
fascicolo: 1, volume: 14, anno: 1998,
pagine: 80 - 82
SICI:
1005-0302(1998)14:1<80:LSODFB>2.0.ZU;2-X
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL VAPOR-DEPOSITION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
5
Recensione:
Indirizzi per estratti:
Citazione:
Z.C. Feng et al., "LOW-TEMPERATURE SYNTHESIS OF DIAMOND FILMS BY CVD OF COMBINED LASERS", JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 14(1), 1998, pp. 80-82

Abstract

Diamond films have been synthesized by means of LCVD through combinedeffects of a XeCl ultraviolet laser and an infrared CO2 laser. A special apparatus has been developed. The conditions of synthesis and the roles played by both lasers were studied. High-purity diamond films were deposited on Si substrates at 340 degrees C.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 24/09/20 alle ore 22:58:59