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Titolo:
A HIGH-POWER RADIO-FREQUENCY TRANSFORMER FOR PLASMA PRODUCTION IN A TOROIDAL PLASMA SOURCE
Autore:
ZHANG BC; CROSS RC;
Indirizzi:
UNIV SYDNEY,DEPT PLASMA PHYS SYDNEY NSW 2006 AUSTRALIA
Titolo Testata:
Review of scientific instruments
fascicolo: 1, volume: 69, anno: 1998,
pagine: 101 - 108
SICI:
0034-6748(1998)69:1<101:AHRTFP>2.0.ZU;2-J
Fonte:
ISI
Lingua:
ENG
Soggetto:
INDUCTION PLASMA; DISCHARGES;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
25
Recensione:
Indirizzi per estratti:
Citazione:
B.C. Zhang e R.C. Cross, "A HIGH-POWER RADIO-FREQUENCY TRANSFORMER FOR PLASMA PRODUCTION IN A TOROIDAL PLASMA SOURCE", Review of scientific instruments, 69(1), 1998, pp. 101-108

Abstract

A high power rf transformer has been developed and implemented for the purpose of plasma production in a toroidal plasma source, PLADEPUS (plasma deposition at the University of Sydney), which is designed for plasma processing experiments. The plasma can be generated, either in a pulsed or a continuous mode, at electron densities up to about 10(13) cm(-3). The results show that rf power can be efficiently transferred to the plasma through the magnetic coupling of the transformer ferrite core. (C) 1998 American Institute of Physics.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 24/09/20 alle ore 23:52:32