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Titolo:
AN AMORPHOUS-SILICON LOCAL INTERCONNECTION (ASLI) CMOS WITH SELF-ALIGNED SOURCE DRAIN AND ITS ELECTRICAL CHARACTERISTICS/
Autore:
YOON YS; BAEK KH; PARK JM; NAM KS;
Indirizzi:
ELECT & TELECOMMUN RES INST,SEMICOND TECHNOL DIV TAEJON SOUTH KOREA
Titolo Testata:
ETRI journal
fascicolo: 4, volume: 19, anno: 1997,
pagine: 402 - 413
SICI:
1225-6463(1997)19:4<402:AALI(C>2.0.ZU;2-R
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHANNEL; MOSFETS;
Tipo documento:
Article
Natura:
Periodico
Citazioni:
14
Recensione:
Indirizzi per estratti:
Citazione:
Y.S. Yoon et al., "AN AMORPHOUS-SILICON LOCAL INTERCONNECTION (ASLI) CMOS WITH SELF-ALIGNED SOURCE DRAIN AND ITS ELECTRICAL CHARACTERISTICS/", ETRI journal, 19(4), 1997, pp. 402-413

Abstract

A CMOS device which has an extended heavily-doped amorphous silicon source/drain layer on the field oxide and an amorphous silicon local interconnection (ASLI) layer in the self-aligned source/drain region hasbeen studied. The ASLI layer has some important roles of the local interconnections from the extended source/drain to the bulk source/drainand the path of the dopant diffusion sources to the bulk. The junction depth and the area of the source/drain can be controlled easily by the ASLI layer thickness. The device in this paper not only has very small area of source/drain junctions, but has very shallow junction depths than those of the conventional ones. The electrical characteristicsof this device are as good as those of the conventional CMOS device, An operating speed, however, is enhanced significantly compared with the conventional ones, because the junction capacitance of the source/drain is reduced remarkably due to the very small area of source/drain junctions. For a 71-stage unloaded CMOS ring oscillator, 128 ps/gate has been obtained at power supply voltage of 3.3 V. Utilizing this proposed structure, a buried channel PMOS device for the deep submicron regime, known to be difficult to implement, can be fabricated easily.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 28/11/20 alle ore 04:13:50