Catalogo Articoli (Spogli Riviste)

OPAC HELP

Titolo:
On the heating mode transition in high-frequency inductively coupled argondischarge
Autore:
Seo, SH; Hong, JI; Bai, KH; Chang, HY;
Indirizzi:
Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea Korea Adv Inst Sci & Technol Taejon South Korea 305701 5701, South Korea
Titolo Testata:
PHYSICS OF PLASMAS
fascicolo: 2, volume: 6, anno: 1999,
pagine: 614 - 618
SICI:
1070-664X(199902)6:2<614:OTHMTI>2.0.ZU;2-C
Fonte:
ISI
Lingua:
ENG
Soggetto:
ENERGY DISTRIBUTION FUNCTION; PLASMA;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
18
Recensione:
Indirizzi per estratti:
Indirizzo: Seo, SH Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea Korea Adv Inst Sci & Technol Taejon South Korea 305701 uth Korea
Citazione:
S.H. Seo et al., "On the heating mode transition in high-frequency inductively coupled argondischarge", PHYS PLASMA, 6(2), 1999, pp. 614-618

Abstract

In high-frequency inductively coupled argon discharges with a planar-type coil the phenomena of discharge mode transition (E-H mode transition) are investigated. Experimental observation is done at the low pressure of 10 mTorr and the high frequency of 19 MHz over a range of rf power, 40-525 W. First of all, the discharge mode transition is observed through a change of luminous intensity. This transition is found to occur at the relatively high power of about 280 W compared with the mode transition in a 6.5 MHz discharge. Also, some distinctive features are compared to low-frequency discharges during this transition. In particular, during the E-H mode transition theapparent changes of plasma potential are observed and the sudden variationof plasma potential is proposed as an important factor that indicates the change of power coupling. The features of the discharge mode transition in high-frequency discharge are discussed by considering the power coupling ar: each mode by measurements of the electron energy distribution functions. (C) 1999 American Institute of Physics. [S1070-664X(99)02002-9].

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 27/11/20 alle ore 06:44:48