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Titolo:
Electron temperature control with grid bias in inductively coupled argon plasma
Autore:
Hong, JI; Seo, SH; Kim, SS; Yoon, NS; Chang, CS; Chang, HY;
Indirizzi:
Korean Adv Inst Sci Technol, Dept Phys, Taejon 305701, South Korea Korean Adv Inst Sci Technol Taejon South Korea 305701 05701, South Korea Korean Basic Sci Inst, Taejon 305333, South Korea Korean Basic Sci Inst Taejon South Korea 305333 ejon 305333, South Korea
Titolo Testata:
PHYSICS OF PLASMAS
fascicolo: 3, volume: 6, anno: 1999,
pagine: 1017 - 1028
SICI:
1070-664X(199903)6:3<1017:ETCWGB>2.0.ZU;2-K
Fonte:
ISI
Lingua:
ENG
Soggetto:
CYCLOTRON-RESONANCE PLASMA; ENERGY-DISTRIBUTION FUNCTION; HIGH-DENSITY PLASMA; SILICON DIOXIDE; DISCHARGE; MODEL; DIAGNOSTICS; IONIZATION; RADICALS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
34
Recensione:
Indirizzi per estratti:
Indirizzo: Hong, JI Korean Adv Inst Sci Technol, Dept Phys, 373-1 Kusong-dong,Yusong-Ku, Taejon Korean Adv Inst Sci Technol 373-1 Kusong-dong,Yusong-Ku Taejon South Korea 305701
Citazione:
J.I. Hong et al., "Electron temperature control with grid bias in inductively coupled argon plasma", PHYS PLASMA, 6(3), 1999, pp. 1017-1028

Abstract

The mechanism of controlling electron temperature with grid-biased voltageis studied experimentally and the relevant physics is discussed in an inductively coupled Ar discharge. To obtain the electron density and electron temperature, the electron energy distribution functions (EEDFs) are measuredwith a Langmuir probe. As the grid voltage decreases negatively, the effective electron temperature is controlled from 2.0 to 0.6 eV and the electrondensity changes from 3x10(10) to 2x10(10) cm(-3) in the diffusion region, while the effective electron temperature and electron density are not changed in the source region. The dependence of such various parameters, as electron density, electron temperature, plasma potential in each region, and soon, on the applied voltage, is presented. The functional relations betweenthe measured physical quantities are well explained based on a global particle and energy balance relations. (C) 1999 American Institute of Physics. [S1070-664X(99)04503-6].

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Documento generato il 23/11/20 alle ore 21:41:43