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Titolo:
Surface modification with ionised cluster beams: Modelling
Autore:
Insepov, Z; Yamada, I;
Indirizzi:
Kyoto Univ, Ion Beam Engn Expt Lab, Sakyo Ku, Kyoto 6068501, Japan Kyoto Univ Kyoto Japan 6068501 Expt Lab, Sakyo Ku, Kyoto 6068501, Japan
Titolo Testata:
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
fascicolo: 1-4, volume: 148, anno: 1999,
pagine: 121 - 125
SICI:
0168-583X(199901)148:1-4<121:SMWICB>2.0.ZU;2-B
Fonte:
ISI
Lingua:
ENG
Soggetto:
ROUGHENING INSTABILITY; ION-BOMBARDMENT; MORPHOLOGY; DEPENDENCE; EVOLUTION; IMPACTS; PT(111); SIO2;
Keywords:
cluster; ion; crater; ripple; viscous; diffusion;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
20
Recensione:
Indirizzi per estratti:
Indirizzo: Insepov, Z Kyoto Univ, Ion Beam Engn Expt Lab, Sakyo Ku, Kyoto 6068501, Japan Kyoto Univ Kyoto Japan 6068501 Sakyo Ku, Kyoto 6068501, Japan
Citazione:
Z. Insepov e I. Yamada, "Surface modification with ionised cluster beams: Modelling", NUCL INST B, 148(1-4), 1999, pp. 121-125

Abstract

Impacts of accelerated cluster ions which consist of hundreds of atoms on a solid surface have shown new surface smoothing and roughening effects. Hybrid Molecular Dynamics (MD) and a two-dimensional MD method were used to simulate rapid collision processes at the target impact zone and the subsequent thermalization. Gas clusters impacting on metal and semiconductor target surfaces have been considered to study the ripple formation under irradiation with oblique cluster beams. The dynamics of surface modification is simulated by using a discrete model which contains crater formation and surface relaxation. The continuum description of a surface relaxation is based on a dynamics equation for surface heights containing viscous flow, surface tension, surface diffusion, and crater formation terms. Comparison of the results of the simulation with experimental data shows qualitative agreement. (C) 1999 Elsevier Science B.V. All rights reserved.

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Documento generato il 27/11/20 alle ore 02:22:17