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Titolo:
Recoils, flows and explosions: surface damage mechanisms in metals and semiconductors during 50 eV 50 keV ion bombardment
Autore:
Nordlund, K; Keinonen, J; Ghaly, M; Averback, RS;
Indirizzi:
Univ Illinois, Mat Res Lab, Urbana, IL 61801 USA Univ Illinois Urbana IL USA 61801 nois, Mat Res Lab, Urbana, IL 61801 USA Univ Helsinki, Accelerator Lab, FIN-00014 Helsinki, Finland Univ HelsinkiHelsinki Finland FIN-00014 ab, FIN-00014 Helsinki, Finland
Titolo Testata:
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
fascicolo: 1-4, volume: 148, anno: 1999,
pagine: 74 - 82
SICI:
0168-583X(199901)148:1-4<74:RFAESD>2.0.ZU;2-5
Fonte:
ISI
Lingua:
ENG
Soggetto:
DISPLACEMENT CASCADES; MOLECULAR-DYNAMICS; SIMULATION; GOLD;
Keywords:
ion irradiation; surface damage; metals; semiconductors;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
40
Recensione:
Indirizzi per estratti:
Indirizzo: Nordlund, K Univ Illinois, Mat Res Lab, Urbana, IL 61801 USA Univ Illinois Urbana IL USA 61801 s Lab, Urbana, IL 61801 USA
Citazione:
K. Nordlund et al., "Recoils, flows and explosions: surface damage mechanisms in metals and semiconductors during 50 eV 50 keV ion bombardment", NUCL INST B, 148(1-4), 1999, pp. 74-82

Abstract

We review some recent simulation results on mechanisms of damage production close to a surface during ion irradiation. The simulation work encompasses studies of several metals and semiconductors at irradiation energies ranging from a few tens of eVs to 50 keV. The results show that in dense metalsthe presence of a surface can dramatically enhance the damage production upto energies of at least 50 keV. The added damage is mostly in the form of vacancy clusters. which can extend quire jeep, similar to 10 nm, in the sample. In semiconductors. by contrast, the surface in general has little effect on the damage production in bulk. (C) 1999 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 02/04/20 alle ore 05:38:55