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Titolo:
MICROMACHINED ION-SELECTIVE ELECTRODES WITH POLYMER MATRIX MEMBRANES
Autore:
KNOLL M; CAMMANN K; DUMSCHAT C; ESHOLD J; SUNDERMEIER C;
Indirizzi:
INST CHEMO & BIOSENSOR MUNSTER,DEPT MICROTECHNOL,W KLEMM STR 8 D-48149 MUNSTER GERMANY FACHSCH MUNSTER MUNSTER GERMANY
Titolo Testata:
Sensors and actuators. B, Chemical
fascicolo: 1, volume: 21, anno: 1994,
pagine: 71 - 76
SICI:
0925-4005(1994)21:1<71:MIEWPM>2.0.ZU;2-7
Fonte:
ISI
Lingua:
ENG
Soggetto:
FIELD-EFFECT TRANSISTORS;
Keywords:
ION-SELECTIVE ELECTRODES; MICROMACHINING; POLYMER MATRIX MEMBRANES;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
15
Recensione:
Indirizzi per estratti:
Citazione:
M. Knoll et al., "MICROMACHINED ION-SELECTIVE ELECTRODES WITH POLYMER MATRIX MEMBRANES", Sensors and actuators. B, Chemical, 21(1), 1994, pp. 71-76

Abstract

We have developed a new method for the integration of ion-sensitive membranes and silicon sensor chips. The ion-sensitive membrane is deposited in pyramidal containments produced on silicon by an anisotropic etching technique. Here we demonstrate the application of this method to the development of nitrate-sensitive sensors. PVC membranes are castinto the membrane containment. The sensors show an improved mechanical stability and lifetime compared to ISFETs. Slopes, detection limits and selectivities of the containment sensors are similar to those of ion-selective electrodes with internal electrolyte solution using the same membrane composition. The results of the drift and hysteresis measurements are sufficiently good for most practical applications.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 04/12/20 alle ore 22:00:09