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Titolo:
MODEL OF LEAD LOSS IN PB(MGXNB1-X)OZ ION-BEAM SPUTTERED THIN-FILMS
Autore:
PIGNOLET A; ROY RA; DOYLE JP; CUOMO JJ;
Indirizzi:
PENN STATE UNIV,MAT RES LAB UNIVERSITY PK PA 16802 IBM CORP,THOMAS J WATSON RES CTR,DIV RES YORKTOWN HTS NY 10598
Titolo Testata:
Journal of vacuum science & technology. A. Vacuum, surfaces, and films
fascicolo: 5, volume: 12, anno: 1994,
pagine: 2840 - 2845
SICI:
0734-2101(1994)12:5<2840:MOLLIP>2.0.ZU;2-6
Fonte:
ISI
Lingua:
ENG
Soggetto:
DEPOSITION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
16
Recensione:
Indirizzi per estratti:
Citazione:
A. Pignolet et al., "MODEL OF LEAD LOSS IN PB(MGXNB1-X)OZ ION-BEAM SPUTTERED THIN-FILMS", Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(5), 1994, pp. 2840-2845

Abstract

Thin films of Pb(Mg(x)Nb1-x)O(z) (hereafter called PMN) have been deposited on carbon substrate by reactive ion beam sputtering, from a mixed oxide-metal multicomponent target composed of magnesium oxide, and metallic niobium and lead. The substrate temperature and sputtering gas composition (oxygen pressure during deposition) were varied and their effects on the film composition and compositional uniformity were investigated. The major effect seen was the systematic variation in Pb content with changes in temperature and gas composition. We also observed a spatial variation in Pb composition across the substrate and believe this to be caused by film bombardment by argon ions specularly reflected by the target surface. This was supported by results showing a systematic reduction in Pb content in films subjected to secondary ionbombardment during film growth. The selective Pb depletion in PMN films is discussed in terms of various mechanisms found in reactive sputtering environments.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 23/09/20 alle ore 22:17:08