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Titolo:
EFFECT OF THE 3-FOLD ASTIGMATISM ON THE PERFORMANCE OF THE FOIL LENS USED FOR CORRECTION OF THE SPHERICAL-ABERRATION OF A PROBE-FORMING LENS
Autore:
HANAI T; HIBINO M; MARUSE S;
Indirizzi:
NAGOYA UNIV,SCH ENGN,DEPT ELECTR NAGOYA 46401 JAPAN MEIJO UNIV NAGOYA AICHI 468 JAPAN
Titolo Testata:
Optik
fascicolo: 2, volume: 97, anno: 1994,
pagine: 86 - 90
SICI:
0030-4026(1994)97:2<86:EOT3AO>2.0.ZU;2-B
Fonte:
ISI
Lingua:
ENG
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
11
Recensione:
Indirizzi per estratti:
Citazione:
T. Hanai et al., "EFFECT OF THE 3-FOLD ASTIGMATISM ON THE PERFORMANCE OF THE FOIL LENS USED FOR CORRECTION OF THE SPHERICAL-ABERRATION OF A PROBE-FORMING LENS", Optik, 97(2), 1994, pp. 86-90

Abstract

In order to study a factor which limits the performance of the foil lens used for correction of the spherical aberration of a probe-forminglens, the diameter of the electron probe formed by the corrected probe-forming lens was measured for the foil lens of different dimensions. The minimum value of the measured probe diameter was smaller for the foil lens of large dimension. It was found from shadow images that thedifference in the minimum probe diameter resulted from the three-foldastigmatism in the foil lens of small dimension. The effect of the foil lens on STEM images was also confirmed at the beam convergence semi-angle of 21 mrad. The image taken with the foil lens of large dimension showed a higher contrast and a higher signal-to-noise ratio compared with the image obtained without the foil lens.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 04/04/20 alle ore 11:40:39