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Titolo:
EPITAXIAL NUCLEATION, GROWTH AND CHARACTERIZATION OF HIGHLY ORIENTED,(100)-TEXTURED DIAMOND FILMS ON SILICON
Autore:
FOX BA; STONER BR; MALTA DM; ELLIS PJ; GLASS RC; SIVAZLIAN FR;
Indirizzi:
KOBE STEEL USA INC,CTR ELECTR MAT,79 TW ALEXANDER DR,POB 13608 RES TRIANGLE PK NC 27709 LINKOPING INST TECHNOL,DEPT PHYS & MEASUREMENT TECHNOL S-58183 LINKOPING SWEDEN N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN RALEIGH NC 27695
Titolo Testata:
DIAMOND AND RELATED MATERIALS
fascicolo: 4-6, volume: 3, anno: 1994,
pagine: 382 - 387
SICI:
0925-9635(1994)3:4-6<382:ENGACO>2.0.ZU;2-3
Fonte:
ISI
Lingua:
ENG
Soggetto:
BIAS-ENHANCED NUCLEATION; TEXTURED GROWTH; POLYCRYSTALLINE; CONDUCTION; TRANSPORT;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
15
Recensione:
Indirizzi per estratti:
Citazione:
B.A. Fox et al., "EPITAXIAL NUCLEATION, GROWTH AND CHARACTERIZATION OF HIGHLY ORIENTED,(100)-TEXTURED DIAMOND FILMS ON SILICON", DIAMOND AND RELATED MATERIALS, 3(4-6), 1994, pp. 382-387

Abstract

Growth of highly oriented, (100)-textured diamond films has been achieved through a multistep growth process which included bias-enhanced nucleation and textured growth. The grain misorientation was analyzed by polar X-ray diffraction, electron diffraction and analysis of the dislocation spacing at a small-angle grain boundary. The electronic properties of simultaneously deposited, randomly oriented polycrystalline;highly oriented, (100) textured, and single-crystal homoepitaxial diamond films were compared to assess the role of grain boundaries. Calculations suggest that the highly oriented, (100)-textured film possessed a lower density of interfacial traps by about 50% compared with randomly oriented polycrystalline diamond film. This reduction in interfacial traps in the highly oriented, (100)-textured film could account for the mobility improvement by a factor of 3 over the mobility of the polycrystalline film. The homoepitaxial film possessed a mobility threetimes that of the highly oriented, (100)-textured film, and it appeared that additional reductions in trap density should provide additional opportunities for improved mobility in highly oriented, (100)-textured films.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 02/12/20 alle ore 08:16:21