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Titolo:
PRECURSOR PROPERTIES OF CALCIUM BETA-DIKETONATE IN VAPOR-PHASE ATOMICLAYER EPITAXY
Autore:
AARIK J; AIDLA A; JAEK A; LESKELA M; NIINISTO L;
Indirizzi:
TARTU UNIV,INST EXPTL PHYS & TECHNOL 2400 TARTU ESTONIA UNIV HELSINKI,INORGAN CHEM LAB SF-00014 HELSINKI FINLAND HELSINKI UNIV TECHNOL,INORGAN & ANALYT CHEM LAB SF-02150 ESPOO FINLAND
Titolo Testata:
Applied surface science
, volume: 75, anno: 1994,
pagine: 33 - 38
SICI:
0169-4332(1994)75:<33:PPOCBI>2.0.ZU;2-M
Fonte:
ISI
Lingua:
ENG
Soggetto:
GAAS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
13
Recensione:
Indirizzi per estratti:
Citazione:
J. Aarik et al., "PRECURSOR PROPERTIES OF CALCIUM BETA-DIKETONATE IN VAPOR-PHASE ATOMICLAYER EPITAXY", Applied surface science, 75, 1994, pp. 33-38

Abstract

Real time mass monitoring was employed to investigate the atomic layer epitaxy process using Ca(thd)(2)/H2O (thd = 2,2,6,6-tetramethyl-3,5-heptanedione) and Ca(thd)(2)/H2S as precursors. The decomposition of Ca(thd)(2) on the substrate surface had a significant effect on the growth process while the fractionation of the precursor in the evaporation cell did not affect the growth rate at source temperatures below 280degrees C. The activation energy of the Ca(thd)(2) decomposition process was determined from the deposit mass measurements, being 30 kJ/mol.

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Documento generato il 01/12/20 alle ore 16:18:15