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Titolo:
LATERAL GRAIN-GROWTH OF POLY-SI FILMS WITH A SPECIFIC ORIENTATION BY AN EXCIMER-LASER ANNEALING METHOD
Autore:
KURIYAMA H; NOHDA T; ISHIDA S; KUWAHARA T; NOGUCHI S; KIYAMA S; TSUDA S; NAKANO S;
Indirizzi:
SANYO ELECT CO LTD,1-18-13 HASHIRIDANI HIRAKATA OSAKA 573 JAPAN GIANT ELECTR TECHNOL CO LTD,CHUO KU TOKYO 103 JAPAN
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
fascicolo: 12B, volume: 32, anno: 1993,
pagine: 6190 - 6195
SICI:
0021-4922(1993)32:12B<6190:LGOPFW>2.0.ZU;2-A
Fonte:
ISI
Lingua:
ENG
Soggetto:
SILICON FILMS; THIN-FILM; CRYSTALLIZATION; TFTS;
Keywords:
POLY-SI; EXCIMER LASER ANNEALING; LATERAL GRAIN GROWTH; GRAIN SIZE; CRYSTALLOGRAPHIC ORIENTATION; SURFACE FREE ENERGY; ANISOTROPY;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
25
Recensione:
Indirizzi per estratti:
Citazione:
H. Kuriyama et al., "LATERAL GRAIN-GROWTH OF POLY-SI FILMS WITH A SPECIFIC ORIENTATION BY AN EXCIMER-LASER ANNEALING METHOD", JPN J A P 1, 32(12B), 1993, pp. 6190-6195

Abstract

Dramatic lateral grain growth of nondoped poly-Si films (maximum grain size: approximately 4.5 mum, film thickness: 500 angstrom) with strong crystallographic (111) orientation on glass substrates has been achieved using an excimer laser annealing method, namely at low temperature below 400-degrees-C and in a processing time shorter than a second,for the first time. The surface morphology of these poly-Si films wasvery smooth and the crystallinity was excellent with minimal internaldefects. These poly-Si films have monomodally distributed grain sizes, with an average grain size of around 1.5 mum. As a result of experimental study, we speculate that the basic driving force behind this lateral grain growth was surface free energy anisotropy, as the same mechanism was observed in high-temperature furnace annealing of doped poly-Si thin films.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 05/12/20 alle ore 15:33:08