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Titolo:
DESIGN AND PERFORMANCE OF A NEW-TYPE OF KNUDSEN CELL FOR CHEMICAL BEAM EPITAXY USING METAL-ORGANIC PRECURSORS
Autore:
BELLMAN R; RAJ R;
Indirizzi:
IOWA STATE UNIV SCI & TECHNOL,DEPT MAT SCI & ENGN AMES IA 50011 CORNELL UNIV,DEPT MAT SCI & ENGN ITHACA NY 14853
Titolo Testata:
Vacuum
fascicolo: 2, volume: 48, anno: 1997,
pagine: 165 - 173
SICI:
0042-207X(1997)48:2<165:DAPOAN>2.0.ZU;2-5
Fonte:
ISI
Lingua:
ENG
Soggetto:
SOLID SOURCE MOCVD; VAPOR-DEPOSITION; THIN-FILMS; LITHIUM-NIOBATE; MOLECULAR-BEAM; GROWTH; TANTALATE; DELIVERY;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
46
Recensione:
Indirizzi per estratti:
Citazione:
R. Bellman e R. Raj, "DESIGN AND PERFORMANCE OF A NEW-TYPE OF KNUDSEN CELL FOR CHEMICAL BEAM EPITAXY USING METAL-ORGANIC PRECURSORS", Vacuum, 48(2), 1997, pp. 165-173

Abstract

A chemical beam epitaxy system (CBE) with a new type of Knudsen cell was constructed to deposit LiTaO3 films by the thermal decomposition of a double metal alkoxide precursor. The Knudsen cell facilitates molecular flow of the precursor to the substrate surface. It permits the use of metal-organic precursors of low volatility, and isolates the precursor from atmospheric moisture. The Knudsen cell is demonstrated to serve as a molecular flux source at controllable rates. The spatial distribution of the flux was measured and compared with Clausing's far field model and Monte Carlo simulations. Good agreement is seen betweenthe measured intensity of the spatial flux distribution and the MonteCarlo simulation; however, the FWHM of the spatial distribution is much greater than that predicted by the far field model. The wider distribution and its Gaussian, rather than Cauchy, shape indicate that the Knudsen cell acts as an extended rather than a point source. This new Knudsen cell should be useful in the CVD growth of ferroelectric and superconductor thin films from low volatility, moisture sensitive precursors. (C) 1997 Elsevier Science Ltd.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 20/09/20 alle ore 22:44:27