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Titolo:
FACETING KINETICS OF STEPPED SI(113) SURFACES - DYNAMIC SCALING AND NANO-SCALE GROOVES
Autore:
SONG S; YOON MR; MOCHRIE SGJ; STEPHENSON GB; MILNER ST;
Indirizzi:
MIT,DEPT PHYS CAMBRIDGE MA 02139 MIT,DEPT PHYS CAMBRIDGE MA 02139 MIT,ELECT RES LAB CAMBRIDGE MA 02139 ARGONNE NATL LAB,DIV MAT SCI ARGONNE IL 60439 EXXON RES & ENGN CO,CORP RES SCI LAB ANNANDALE NJ 08801
Titolo Testata:
Surface science
fascicolo: 1-3, volume: 372, anno: 1997,
pagine: 37 - 63
SICI:
0039-6028(1997)372:1-3<37:FKOSSS>2.0.ZU;2-4
Fonte:
ISI
Lingua:
ENG
Soggetto:
X-RAY-SCATTERING; ORIENTATIONAL PHASE-DIAGRAM; SCANNING-TUNNELING-MICROSCOPY; ENERGY-ELECTRON-DIFFRACTION; EQUILIBRIUM CRYSTAL SHAPES; VICINAL SI(111); SI SURFACES; SPINODAL DECOMPOSITION; RENORMALIZATION-GROUP; CRITICAL-BEHAVIOR;
Keywords:
FACETING; MODELS OF SURFACE KINETICS; SILICON; STEPPED SINGLE CRYSTAL SURFACES; SURFACE STRUCTURE, MORPHOLOGY, ROUGHNESS, AND TOPOGRAPHY; X-RAY SCATTERING DIFFRACTION, AND REFLECTION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
89
Recensione:
Indirizzi per estratti:
Citazione:
S. Song et al., "FACETING KINETICS OF STEPPED SI(113) SURFACES - DYNAMIC SCALING AND NANO-SCALE GROOVES", Surface science, 372(1-3), 1997, pp. 37-63

Abstract

Time-resolved synchrotron X-ray scattering studies are presented of the faceting kinetics of stepped silicon surfaces misoriented by 2.1 degrees and 1.3 degrees from the cubic [113] direction towards the [001]direction. Following a quench from the high-temperature one-phase region of the orientational phase diagram into the two-phase coexistence region, originally-uniformly-distributed steps rearrange to form a grooved superstructure. Time-resolved surface X-ray scattering measurements reveal the behavior of the grooved surface morphology as a functionof time. For times up to several hundred seconds after a quench, the behaviors of the specular and diffuse scattering intensity support a dynamic scaling description of the surface morphology. Specifically, the surface is found to be selfsimilar in time, with a characteristic groove side (L) varying as a power-law versus time (t): L=L(o)t(phi) with a coarsening exponent of phi = 0.164 +/- 0.021 similar or equal to 1/6. phi = 1/6 is consistent with a theory which focuses on thermally fluctuating step bunches and lakes their collisions as the key growth mechanism. At later times, the groove size approaches a limiting value which depends on the stepped phase misorientation angle. This is consistent with the behavior expected for faceted surfaces in the case thatelastic effects are important [V.I. Marchenko, Zh. Eksp. Teor. Fiz. 81 (1981) 1141].

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Documento generato il 26/09/20 alle ore 02:12:02