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Titolo:
HIGH DEPOSITION RATE COATING WITH NANODISPERSE SIC POWDER BY PLASMA-ASSISTED PULSE PYROLYSIS
Autore:
DROST H; FRIEDRICH M; MOHR R;
Indirizzi:
TECH UNIV BERLIN,INST NICHTMET WERKSTOFFE,ARG GR PLASMACHEM,RUDOWER CHAUSSEE 5 D-12489 BERLIN GERMANY
Titolo Testata:
Surface & coatings technology
fascicolo: 1-3, volume: 74-5, anno: 1995,
pagine: 508 - 511
SICI:
0257-8972(1995)74-5:1-3<508:HDRCWN>2.0.ZU;2-Y
Fonte:
ISI
Lingua:
ENG
Keywords:
HIGH RATE DEPOSITION; SIC; PULSE PYROLYSIS; SHOCK TUBE; NANODISPERSE POWDERS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
7
Recensione:
Indirizzi per estratti:
Citazione:
H. Drost et al., "HIGH DEPOSITION RATE COATING WITH NANODISPERSE SIC POWDER BY PLASMA-ASSISTED PULSE PYROLYSIS", Surface & coatings technology, 74-5(1-3), 1995, pp. 508-511

Abstract

With regard to the development of a high deposition rate coating process at low substrate temperatures, we investigated whether this can berealized by the formation of nanodisperse SiC particles and their deposition in a one-step process. The SiC powders were obtained by plasma-assisted pyrolysis of tetramethylsilane (TMS) as particle precursor. Owing to a reduction in the amount of particles and the prevention of substrate heating, the particles were formed by pulse pyrolysis at temperatures of 1200-2000 K and at pulse times of 0.1-4 ms. The investigations were performed by means of a shock tube. The powders obtained are nanodisperse with particle sizes in the range below 40 nm consistingof variable contents of both amorphous SiC and crystalline beta-SiC The powders form very thin layers; a single pulse generates a layer with a thickness in the range 40-80 nm, determined by ellipsometric measurements. The layers adhere on the substrate but because of a lack of deposition energy their solidity and adherence on the substrate are notsufficient. Investigations were performed to increase the solidity ofthe layers by subsequent energy transfer to the layer.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 24/09/20 alle ore 08:20:20