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Titolo:
A COMPARISON OF C54-TISI2 FORMATION IN BLANKET AND SUBMICRON GATE STRUCTURES USING IRT SITU X-RAY-DIFFRACTION DURING RAPID THERMAL ANNEALING
Autore:
CLEVENGER LA; ROY RA; CABRAL C; SAENGER KL; BRAUER S; MORALES G; LUDWIG KF; GIFFORD G; BUCCHIGNANO J; JORDANSWEET J; DEHAVEN P; STEPHENSON GB;
Indirizzi:
IBM CORP,THOMAS J WATSON RES CTR,DIV RES,POB 218 YORKTOWN HTS NY 10598 BOSTON UNIV,DEPT PHYS BOSTON MA 02215 IBM CORP,DIV MICROELECTR HOPEWELL JCT NY 12533
Titolo Testata:
Journal of materials research
fascicolo: 9, volume: 10, anno: 1995,
pagine: 2355 - 2359
SICI:
0884-2914(1995)10:9<2355:ACOCFI>2.0.ZU;2-5
Fonte:
ISI
Lingua:
ENG
Soggetto:
TISI2; FILMS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
13
Recensione:
Indirizzi per estratti:
Citazione:
L.A. Clevenger et al., "A COMPARISON OF C54-TISI2 FORMATION IN BLANKET AND SUBMICRON GATE STRUCTURES USING IRT SITU X-RAY-DIFFRACTION DURING RAPID THERMAL ANNEALING", Journal of materials research, 10(9), 1995, pp. 2355-2359

Abstract

We demonstrate the use of a synchrotron radiation source for in situ x-ray diffraction analysis during rapid thermal annealing (RTA) of 0.35 mu m Salicide (self-aligned silicide) and 0.4 mu m Polycide (silicided polysilicon) TiSi2 Complementary Metal Oxide Semiconductor (CMOS) gate structures. It is shown that the transformation from the C49 to C54 phase of TiSi2 occurs at higher temperatures in submicron gate structures than in unpatterned blanket films. In addition, the C54 that forms in submicron structures is (040) oriented, while the C54 that formsin unpatterned Salicide films is randomly oriented. Although the preferred oreintation of the initial C49 phase was different in the Salicide and Polycide gate structures, the final orientation of the C54 phase formed was the same. An incomplete conversion of C49 into C54-TiSi2 during the RTA of Polycide gate structures was observed and is attributed to the retarding effects of phosphorus on the transition.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 24/09/20 alle ore 06:53:28