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Titolo:
SOL-GEL PROCESSED TIO2-BASED THIN-FILMS AS INNOVATIVE HUMIDITY SENSORS
Autore:
MONTESPERELLI G; PUMO A; TRAVERSA E; GUSMANO G; BEARZOTTI A; MONTENERO A; GNAPPI G;
Indirizzi:
UNIV ROMA TOR VERGATA,DIPARTIMENTO SCI & TECNOL CHIM,VIA RIC SCI I-00133 ROME ITALY CNR,IST ELETTRON STATO SOLIDO I-00156 ROME ITALY UNIV PARMA,DIPARTIMENTO CHIM GEN & INORGAN CHIM ANALIT CHIM I-43100 PARMA ITALY CORIVE I-43100 PARMA ITALY
Titolo Testata:
Sensors and actuators. B, Chemical
fascicolo: 1-3, volume: 25, anno: 1995,
pagine: 705 - 709
SICI:
0925-4005(1995)25:1-3<705:SPTTAI>2.0.ZU;2-F
Fonte:
ISI
Lingua:
ENG
Soggetto:
ELECTRICAL-PROPERTIES; MICROSTRUCTURE; SENSITIVITY;
Keywords:
HUMIDITY SENSORS; SOL-GEL PROCESS; THIN FILMS; TITANIA; ALKALI;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
24
Recensione:
Indirizzi per estratti:
Citazione:
G. Montesperelli et al., "SOL-GEL PROCESSED TIO2-BASED THIN-FILMS AS INNOVATIVE HUMIDITY SENSORS", Sensors and actuators. B, Chemical, 25(1-3), 1995, pp. 705-709

Abstract

Active elements for humidity sensors based on alkali-doped and undoped TiO2 films have been prepared by the sol-gel technique, TiO2-based films are deposited onto Al2O3 substrates with comb-type Au electrodes by dip-coating, from the appropriate solutions, to obtain four different compositions of 1, 3, 6, and 10 at.% Li and K, with respect to the alkali metal/Ti system. The humidity-sensing electrical properties of the films are evaluated using d.c. and a.c. measurements. The electrical characterization of TiO2 films doped with 10 at.% K shows that thismaterial has some unique properties. Resistance versus relative humidity (rh) values show variations as high as seven orders of magnitude in the humidity range tested. Very high humidity sensitivity is also observed at the lowest rh values (4-10% rh), at 40 degrees C, when the resistance is measured at frequencies lower than 1 Hz. The results alsoshow great stability over time. The possibility of modifying the rh sensitivity of TiO2 films doped with 10 at.% K by varying the frequencyat which the resistance is measured is a characteristic that allows this material to be described as smart.

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Documento generato il 19/09/20 alle ore 09:26:37