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Titolo:
SOME EFFECTS OF SILICON SUBSTRATE ROUGHNESS ON THE GROWTH OF HIGHLY ORIENTED (100) DIAMOND FILMS
Autore:
ELLIS PJ; BUHAENKO DS; STONER BR;
Indirizzi:
KOBE STEEL EUROPE LTD,10 NUGENT RD,SURREY RES PK GUILDFORD GU2 5AF SURREY ENGLAND KOBE STEEL ELECTR MAT CTR RES TRIANGLE PK NC 27709
Titolo Testata:
DIAMOND AND RELATED MATERIALS
fascicolo: 4, volume: 4, anno: 1995,
pagine: 406 - 409
SICI:
0925-9635(1995)4:4<406:SEOSSR>2.0.ZU;2-N
Fonte:
ISI
Lingua:
ENG
Keywords:
CHARACTERIZATION; MICROWAVE PLASMA CVD; NUCLEATION AND GROWTH; ORIENTATION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
7
Recensione:
Indirizzi per estratti:
Citazione:
P.J. Ellis et al., "SOME EFFECTS OF SILICON SUBSTRATE ROUGHNESS ON THE GROWTH OF HIGHLY ORIENTED (100) DIAMOND FILMS", DIAMOND AND RELATED MATERIALS, 4(4), 1995, pp. 406-409

Abstract

Highly oriented, [100]-textured diamond films have been successfully grown on pristine silicon substrates using bias-enhanced nucleation techniques. This paper describes the characteristics of a highly oriented him deposited on the rough, as-cut, underside of a manufacturer-prepared silicon wafer. It was considered possible that the rougher, as-cut silicon surfaces would yield shorter incubation times for oriented diamond nucleation and that these nuclei would grow out into an oriented layer with improved registration to the underlying silicon surface. Standard characterization techniques have been used to study diamond films grown on as-cut silicon surfaces. SEM images show that the undulating topography of the as-cut substrate is retained during the early stages of diamond growth: however, films of similar smoothness to thosegrown on the polished side can be achieved by extending the growth times on the roughened surface. Raman full width at half-maximum at 1332cm(-1) and X-ray diffraction data also indicate that films of equal quality can be grown on either side of a commercially available siliconwafer.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 28/11/20 alle ore 03:54:39