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Titolo:
DYNAMIC SCALING OF ION-SPUTTERED ROTATING SURFACES
Autore:
BRADLEY RM;
Indirizzi:
COLORADO STATE UNIV,DEPT PHYS FT COLLINS CO 80523
Titolo Testata:
Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics
fascicolo: 6, volume: 54, anno: 1996,
pagine: 6149 - 6152
SICI:
1063-651X(1996)54:6<6149:DSOIRS>2.0.ZU;2-U
Fonte:
ISI
Lingua:
ENG
Soggetto:
KURAMOTO-SIVASHINSKY EQUATION; AUGER-ELECTRON SPECTROSCOPY; LONG-WAVELENGTH PROPERTIES; SAMPLE ROTATION; ROUGHENING INSTABILITY; UNIVERSAL PROPERTIES; STOCHASTIC-MODEL; DEPTH RESOLUTION; RIPPLE FORMATION; GROWTH;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
37
Recensione:
Indirizzi per estratti:
Citazione:
R.M. Bradley, "DYNAMIC SCALING OF ION-SPUTTERED ROTATING SURFACES", Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 54(6), 1996, pp. 6149-6152

Abstract

Surfaces eroded by off-normal incidence ion bombardment often have a rippled topography, and this is undesirable in a number of applications. Sample rotation during sputtering inhibits or prevents surface roughening and is widely used in precision depth profiling. In this paper,I study the surface roughening of a sample that is simultaneously rotated and sputtered in the limit in which viscous flow can be neglected. I find that the structure of the surface depends on the sign of a parameter characterizing the curvature dependence of the sputter yield, mu(av). For mu(av)>0, the asymptotic scaling behavior of the surface is in the same universality class as the Kardar-Parisi-Zhang equation in 2+1 dimensions. At long times the surface is composed of a patchworkof paraboloids of revolution whose mean lateral dimension grows algebraically in time, a topography quite reminiscent of those observed experimentally. In contrast, the interface has a chaotic cellular structure described by the isotropic Kuramoto-Sivashinsky equation if mu(av)<0. The mean cell width is constant in time in this case.

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Documento generato il 03/12/20 alle ore 12:20:23