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Titolo:
GROWTH AND CHARACTERIZATION OF TA W MULTISCALAR MULTILAYER COMPOSITE FILMS/
Autore:
MALHOTRA AK; YALISOVE SM; BILELLO JC;
Indirizzi:
IBM CORP,D-48 CA B-330 C,1580 ROUTE 52 Z-20A HOPEWELL JCT NY 12533 UNIV MICHIGAN,DEPT MAT SCI & ENGN ANN ARBOR MI 48109
Titolo Testata:
Thin solid films
fascicolo: 1-2, volume: 286, anno: 1996,
pagine: 196 - 202
SICI:
0040-6090(1996)286:1-2<196:GACOTW>2.0.ZU;2-7
Fonte:
ISI
Lingua:
ENG
Soggetto:
THIN-FILMS; MECHANICAL-PROPERTIES; GRAIN-GROWTH; X-RAY; STRENGTH; TANTALUM; TEXTURE; MICROSTRUCTURE; DEPOSITION;
Keywords:
COATINGS; HARDNESS; MULTILAYERS; X-RAY DIFFRACTION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
30
Recensione:
Indirizzi per estratti:
Citazione:
A.K. Malhotra et al., "GROWTH AND CHARACTERIZATION OF TA W MULTISCALAR MULTILAYER COMPOSITE FILMS/", Thin solid films, 286(1-2), 1996, pp. 196-202

Abstract

Multiscalar multilayer composite films of Ta/W were fabricated using planar magnetron sputtering. Two sets of films were grown to a total thickness of 22 mu m and consisted of two alternating layers: a hard slack composed of 29 layers of 40 Angstrom thick alternating W and Ta layers and a thicker tough layer of pure Ta. The two sets had similar hard stack configurations, but differed in their rough layer thickness (3.5 and 7 mu m). X-Ray diffraction and scanning electron microscopy studies revealed a b.c.c. crystal structure throughout the thickness of each film. The films had a columnar microstructure, with the individual columns showing a [111]-type growth direction and a weak {111} texture in the plane of growth. Hardness values of the order of 480 kgf mm(-2) (4.7 GPa), about four times the values calculated using the rule of mixtures for a chemically similar bulk composite, were measured for the Ta/W films. No microcracks emanating from the hardness indentations were observed, indicating high toughness of these multilayer composites. It was shown in this study that the composite-type approach for providing concomitant strength and toughness in thin films can be applied to more than one material system.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 05/07/20 alle ore 13:29:24