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Titolo:
OPTICAL CHARACTERIZATION OF SURFACES DURING EPITAXIAL-GROWTH USING RDS AND GIXS
Autore:
KAMIYA I; MANTESE L; ASPNES DE; KISKER DW; FUOSS PH; STEPHENSON GB; BRENNAN S;
Indirizzi:
JRDC,QUANTUM TRANSIT PROJECT,MEGURO KU,4-7-6 KOMABA TOKYO 153 JAPAN UNIV LONDON IMPERIAL COLL SCI & TECHNOL,RES DEV CORP JAPAN LONDON SW72BZ ENGLAND N CAROLINA STATE UNIV,DEPT PHYS RALEIGH NC 27695 IBM CORP,THOMAS J WATSON RES CTR YORKTOWN HTS NY 10598 AT&T BELL LABS MURRAY HILL NJ 07974 STANFORD SYNCHROTRON RADIAT LAB STANFORD CA 94309
Titolo Testata:
Journal of crystal growth
fascicolo: 1-2, volume: 163, anno: 1996,
pagine: 67 - 77
SICI:
0022-0248(1996)163:1-2<67:OCOSDE>2.0.ZU;2-Z
Fonte:
ISI
Lingua:
ENG
Soggetto:
X-RAY-SCATTERING; MOLECULAR-BEAM EPITAXY; REFLECTANCE-DIFFERENCE SPECTROSCOPY; CHEMICAL-VAPOR-DEPOSITION; 001 GAAS-SURFACES; VICINAL GAAS(001); PHASE EPITAXY; MBE GROWTH; RECONSTRUCTIONS; OSCILLATIONS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
30
Recensione:
Indirizzi per estratti:
Citazione:
I. Kamiya et al., "OPTICAL CHARACTERIZATION OF SURFACES DURING EPITAXIAL-GROWTH USING RDS AND GIXS", Journal of crystal growth, 163(1-2), 1996, pp. 67-77

Abstract

Structures of (001)GaAs surfaces during organometallic vapor phase epitaxy (OMVPE) have been studied by simultaneous measurements using reflectance difference spectroscopy (RDS) and grazing incidence X-ray scattering (GIXS). The data obtained by the two techniques are strongly correlated. We find that RDS, although not a diffraction probe, can distinguish most surface reconstructions of (001)GaAs. The information obtained by these two probes is complementary, so by combining RDS and GIXS data obtained from surfaces under static and dynamic conditions wecan gain detailed information about atomic arrangements and growth mechanisms. Under static conditions, we find that RD spectra under OMVPEconditions are similar to those previously observed in ultrahigh vacuum (UHV). By simultaneously monitoring the surface reconstructions using GIXS and RDS, we have established that RDS accurately reflects the local structural configurations but is not uniquely sensitive to changes in long range order or subtle differences in symmetry. Growth oscillations were also measured simultaneously by RDS and GIXS under various conditions. The observed oscillation periods agree with each other, but the details are condition dependent, thus providing important clues concerning the surface processes involved. For example, the one-to-one correlation observed between RDS and GIXS oscillations suggests that the RDS oscillations are related to island formation.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 24/09/20 alle ore 07:37:41