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Titolo:
BEHAVIOR OF ALKOXY-FUNCTIONAL GROUPS ON ATMOSPHERIC-PRESSURE CHEMICAL-VAPOR-DEPOSITION USING ALKOXYSILANE AND OZONE
Autore:
IKEDA K; MAEDA M;
Indirizzi:
NIPPON TELEGRAPH & TEL PUBL CORP,LSI LABS,3-1 MORINOSATO WAKAMIYA ATSUGI KANAGAWA 24301 JAPAN
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
fascicolo: 2B, volume: 35, anno: 1996,
pagine: 1573 - 1578
SICI:
0021-4922(1996)35:2B<1573:BOAGOA>2.0.ZU;2-V
Fonte:
ISI
Lingua:
ENG
Soggetto:
SILICON;
Keywords:
APCVD; SILICON DIOXIDE; ALKOXYSILANE; OZONE; ALCOHOL; DEUTERIUM SUBSTITUTION; STEP COVERAGE; FLOWING-LIKE PROFILE;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
11
Recensione:
Indirizzi per estratti:
Citazione:
K. Ikeda e M. Maeda, "BEHAVIOR OF ALKOXY-FUNCTIONAL GROUPS ON ATMOSPHERIC-PRESSURE CHEMICAL-VAPOR-DEPOSITION USING ALKOXYSILANE AND OZONE", JPN J A P 1, 35(2B), 1996, pp. 1573-1578

Abstract

Behavior of alkoxy-functional [RO-] groups in an atmospheric-pressurechemical vapor deposition (APCVD) reaction using alkoxysilane and ozone is evaluated by alcohol addition. The RO- groups from the alcohol affect the flow characteristics of the APCVD reaction. Formation of a flowing-like profile can be accelerated by increasing the partial pressure of RO- groups in the reaction system when the added RO- groups areof the same size as, or smaller than, the RO- groups of silicon sources. When acceleration occurs, the amount of carbon and hydrogen atoms from RO- groups of added alcohols incorporated in the deposited film increases. Thermal desorption spectroscopy (TDS) shows three states forthe carbon incorporated in the deposited film. Water desorption, which is related to the incorporated hydrogen, is also measured. Hydrolysis occurs at the residual terminal groups (i.e., Si-H and Si-OH), whichare associated with the flow characteristics.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 10/07/20 alle ore 19:13:31