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Titolo:
SHEATH IMPEDANCE EFFECTS IN VERY HIGH-FREQUENCY PLASMA-EXPERIMENTS
Autore:
SCHWARZENBACH W; HOWLING AA; FIVAZ M; BRUNNER S; HOLLENSTEIN C;
Indirizzi:
ECOLE POLYTECH FED LAUSANNE,CTR RECH PHYS PLASMAS CH-1007 LAUSANNE SWITZERLAND ECOLE POLYTECH FED LAUSANNE,CTR RECH PHYS PLASMAS CH-1007 LAUSANNE SWITZERLAND
Titolo Testata:
Journal of vacuum science & technology. A. Vacuum, surfaces, and films
fascicolo: 1, volume: 14, anno: 1996,
pagine: 132 - 138
SICI:
0734-2101(1996)14:1<132:SIEIVH>2.0.ZU;2-A
Fonte:
ISI
Lingua:
ENG
Soggetto:
HYDROGENATED AMORPHOUS-SILICON; CHEMICAL VAPOR-DEPOSITION; COUPLED RF DISCHARGES; ARGON GLOW-DISCHARGES; RADIO-FREQUENCY; EXCITATION-FREQUENCY; ION-BOMBARDMENT; PLANAR SYSTEM; POWER; SIMULATIONS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
40
Recensione:
Indirizzi per estratti:
Citazione:
W. Schwarzenbach et al., "SHEATH IMPEDANCE EFFECTS IN VERY HIGH-FREQUENCY PLASMA-EXPERIMENTS", Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(1), 1996, pp. 132-138

Abstract

The frequency dependence (13.56-70 MHz) of the ion energy distribution at the ground electrode was measured by mass spectrometry in a symmetrical capacitive impedance at very high frequency allows high levels of plasma power and substrate ion flux while maintaining low levels ofion energy and electrode voltage. The lower limit of ion bombardment energy is fixed by the sheath floating potential at high frequency, incontrast to low frequencies where only the radio frequency voltage amplitude is a determinant. The capacitive sheaths are thinner at high frequencies which accentuates the high frequency reduction in sheath impedance. It is argued that the frequency dependence of sheath impedance is responsible for the principal characteristics of very high frequency plasmas. The measurements are summarized by simple physical descriptions and compared with a particle-in-cell simulation. (C) 1996 American Vacuum Society.

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Documento generato il 11/07/20 alle ore 10:15:47