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Titolo:
REAL-TIME MONITORING OF NH3 CONCENTRATION USING DIFFUSION SCRUBBER SAMPLING TECHNIQUE AND RESULT OF APPLICATION TO THE PROCESSING OF CHEMICALLY AMPLIFIED RESISTS
Autore:
PARK JC; BAE EY; PARK CG; HAN WS; KOH YB; LEE MY; LEE JG;
Indirizzi:
SAMSUNG ELECTR CO LTD,SAN 24 NONGSEO RI KYONGGI DO 449900 SOUTH KOREA
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
fascicolo: 12B, volume: 34, anno: 1995,
pagine: 6770 - 6773
SICI:
0021-4922(1995)34:12B<6770:RMONCU>2.0.ZU;2-U
Fonte:
ISI
Lingua:
ENG
Keywords:
CHEMICALLY AMPLIFIED RESIST; ENVIRONMENTAL SENSITIVITY; NH3; CONCENTRATION MEASUREMENT; DIFFUSION SCRUBBER; REAL-TIME MONITORING;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
10
Recensione:
Indirizzi per estratti:
Citazione:
J.C. Park et al., "REAL-TIME MONITORING OF NH3 CONCENTRATION USING DIFFUSION SCRUBBER SAMPLING TECHNIQUE AND RESULT OF APPLICATION TO THE PROCESSING OF CHEMICALLY AMPLIFIED RESISTS", JPN J A P 1, 34(12B), 1995, pp. 6770-6773

Abstract

The application of chemically amplified resist is known to cause a problem in the accurate measurement of the concentration of basic gas species (NH3, N-methylpyrrolidone (NMP)) in a clean room environment because it is sensitive to its environment. Among various methods of measurement, diffusion scrubber sampling method was selected and tested. The environmental sensitivity of a commercial chemically amplified resist, APEX-E, was also tested. For the concentration measurement, the method proved tc, be, suitable for automation and good for measuring NH3concentration as low as the sub ppb level(limit of detection similar to 0.08 ppb). Some measurement results concerning various aspects of application are presented. Test results oi the environmental stability of chemically amplified resists showed that NH3 concentration should be controlled to at least under 7.5 ppb for maintaining the process stability.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 27/11/20 alle ore 15:55:57