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Titolo:
INVESTIGATION OF THE RELATIONSHIP BETWEEN REFLECTANCE DIFFERENCE SPECTROSCOPY AND SURFACE-STRUCTURE USING GRAZING-INCIDENCE X-RAY-SCATTERING
Autore:
KISKER DW; STEPHENSON GB; KAMIYA I; FUOSS PH; ASPNES DE; MANTESE L; BRENNAN S;
Indirizzi:
IBM CORP,DIV RES,POB 218 YORKTOWN HTS NY 10598 N CAROLINA STATE UNIV,DEPT PHYS RALEIGH NC 27695 AT&T BELL LABS MURRAY HILL NJ 07974 STANFORD SYNCHROTRON RADIAT LAB MENLO PK CA 00000
Titolo Testata:
Physica status solidi. a, Applied research
fascicolo: 1, volume: 152, anno: 1995,
pagine: 9 - 21
SICI:
0031-8965(1995)152:1<9:IOTRBR>2.0.ZU;2-7
Fonte:
ISI
Lingua:
ENG
Soggetto:
MOLECULAR-BEAM EPITAXY; VAPOR-PHASE EPITAXY; 001 GAAS; GROWTH; RECONSTRUCTIONS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
20
Recensione:
Indirizzi per estratti:
Citazione:
D.W. Kisker et al., "INVESTIGATION OF THE RELATIONSHIP BETWEEN REFLECTANCE DIFFERENCE SPECTROSCOPY AND SURFACE-STRUCTURE USING GRAZING-INCIDENCE X-RAY-SCATTERING", Physica status solidi. a, Applied research, 152(1), 1995, pp. 9-21

Abstract

In this work, in-situ grazing incidence X-ray scattering is used to correlate surface structures observed during organometallic vapor phasegrowth of GaAs with in-situ optical measurements using reflectance difference spectroscopy (RDS). Our observations of several reconstructions confirm that RDS signals vary among the different surfaces present under vapor phase epitaxy conditions, as also occurs under ultra-high vacuum growth conditions. In addition, the simultaneous observation ofintensity oscillations in the X-ray scattering signal and the reflectance difference signal indicates that both of these techniques can be used to monitor layer-by-layer growth processes under some conditions.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 19/09/20 alle ore 13:54:44