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Titolo:
CHARACTERIZATION OF CUBIC BORON-NITRIDE FILMS GROWN BY MASS SEPARATEDION-BEAM DEPOSITION
Autore:
HOFSASS H; RONNING C; GRIESMEIER U; GROSS M; REINKE S; KUHR M; ZWECK J; FISCHER R;
Indirizzi:
UNIV KONSTANZ,FAC PHYS,POSTFACH 5560 D-78434 CONSTANCE GERMANY UNIV KASSEL D-34109 KASSEL GERMANY UNIV REGENSBURG,NWF2 PHYS D-93040 REGENSBURG GERMANY
Titolo Testata:
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
fascicolo: 1-4, volume: 106, anno: 1995,
pagine: 153 - 158
SICI:
0168-583X(1995)106:1-4<153:COCBFG>2.0.ZU;2-F
Fonte:
ISI
Lingua:
ENG
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Science Citation Index Expanded
Science Citation Index Expanded
Citazioni:
28
Recensione:
Indirizzi per estratti:
Citazione:
H. Hofsass et al., "CHARACTERIZATION OF CUBIC BORON-NITRIDE FILMS GROWN BY MASS SEPARATEDION-BEAM DEPOSITION", Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 106(1-4), 1995, pp. 153-158

Abstract

We have prepared BN films by ion beam deposition of mass separated low energy B-11(+) and N-14(+) ions with energies between 100 and 500 eV. The silicon substrates were kept at room temperature or heated up to350 degrees C. The films were characterized with Auger electron spectroscopy and Rutherford backscattering. The influence of ion energy, ion flux and substrate temperature on the c-BN formation will be discussed. Successful synthesis of cubic boron nitride (c-BN) with a phase purity up to 80% is confirmed by infrared absorption spectroscopy, transmission electron microscopy (TEM) and transmission electron diffraction (TED). For a film with high c-BN content TEM revealed a growth sequence of an amorphous interface layer, followed by few nm of highly oriented hexagonal BN (h-BN) and a layer of nanocrystalline c-BN, We were also able to produce a textured h-BN layer in between two c-BN layers.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 29/09/20 alle ore 20:40:47