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Titolo:
INCREASE OF CURRENT-DENSITY OF THE ELECTRON-PROBE BY CORRECTION OF THE SPHERICAL-ABERRATION WITH A SIDE-ENTRY TYPE FOIL LENS
Autore:
HANAI T; ARAI S; HIBINO M;
Indirizzi:
NAGOYA UNIV,SCH ENGN,DEPT ELECTR NAGOYA AICHI 46401 JAPAN
Titolo Testata:
Journal of Electron Microscopy
fascicolo: 5, volume: 44, anno: 1995,
pagine: 301 - 306
SICI:
0022-0744(1995)44:5<301:IOCOTE>2.0.ZU;2-8
Fonte:
ISI
Lingua:
ENG
Keywords:
SPHERICAL ABERRATION CORRECTION; FOIL LENS; SCANNING TRANSMISSION ELECTRON MICROSCOPY; ELECTRON PROBE; ELECTRON LENS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
8
Recensione:
Indirizzi per estratti:
Citazione:
T. Hanai et al., "INCREASE OF CURRENT-DENSITY OF THE ELECTRON-PROBE BY CORRECTION OF THE SPHERICAL-ABERRATION WITH A SIDE-ENTRY TYPE FOIL LENS", Journal of Electron Microscopy, 44(5), 1995, pp. 301-306

Abstract

A side-entry type foil lens for insertion into the gap of the polepieces of a probe-forming lens was developed, The new design allows an accurate alignment of the foil lens and therefore better correction performance compared with the top-entry type foil lens previously used, The scanning transmission electron microscope (STEM) image taken with the foil lens at a large beam convergence semi-angle of 26 mrad showed the sharpness of the image to be similar to that taken without the foillens at the optimum angle of 14 mrad, confirming correction of the spherical aberration, The optimum foil lens voltage giving the best image quality was in good agreement with the calculations of the probe current density profiles, The signal-to-noise ratio of the image was improved because of the higher probe current due to the increased beam convergence angle, This shows the effectiveness of the spherical aberration correction with the foil lens.

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Documento generato il 05/04/20 alle ore 22:56:08