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Titolo:
1 PM SPECTRALLY NARROWED ARF EXCIMER-LASER INJECTION-LOCKED BY 4TH HARMONIC SEED SOURCE OF 773.6 NM TI-SAPPHIRE LASER
Autore:
KASAMATSU T; TSUNEKANE M; SEKITA H; MORISHIGE Y; KISHIDA S;
Indirizzi:
NEC CORP LTD,OPTOELECTR RES LABS,MIYAMAE KU,4-1-1 MIYAZAKI KAWASAKI KANAGAWA 216 JAPAN NEC CORP LTD,CTR ANAL & EVALUAT,NAKAHARA KU KAWASAKI KANAGAWA 211 JAPAN
Titolo Testata:
Applied physics letters
fascicolo: 23, volume: 67, anno: 1995,
pagine: 3396 - 3398
SICI:
0003-6951(1995)67:23<3396:1PSNAE>2.0.ZU;2-N
Fonte:
ISI
Lingua:
ENG
Soggetto:
193 NM; PULSES; SYSTEM; AMPLIFICATION; LITHOGRAPHY; GENERATION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
11
Recensione:
Indirizzi per estratti:
Citazione:
T. Kasamatsu et al., "1 PM SPECTRALLY NARROWED ARF EXCIMER-LASER INJECTION-LOCKED BY 4TH HARMONIC SEED SOURCE OF 773.6 NM TI-SAPPHIRE LASER", Applied physics letters, 67(23), 1995, pp. 3396-3398

Abstract

We have achieved spectrum narrowing to 1 pm in a high-power ArF excimer laser injection locked by an all solid-state fourth harmonic (193.4nm) seed source of 773.6 nm Ti:sapphire laser radiation. Superior laser properties such as sufficient output energy (90 mJ/pulse, 50 pps), locking efficiency exceeding 90%, wavelength drift less than 0.4 pm, and spectrum bandwidth fluctuation less than 0.2 pm were obtained, which meet the requirements for 1 Gbit dynamic random access memory microlithography. (C) 1995 American Institute of Physics.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 25/09/20 alle ore 13:41:00