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La ricerca find articoli where soggetti phrase all words 'wafer' sort by level,fasc_key/DESCEND, pagina_ini_num/ASCEND ha restituito 908 riferimenti
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    1. Lee, YH; Park, J; Kim, S
      Experimental study on input and bottleneck scheduling for a semiconductor fabrication line

      IIE TRANSACTIONS
    2. Ni, J; Coldiron, SJ; Zhong, CJ; Porter, MD
      Electrochemically-actuated mercury valve for flow rate and direction control: design, characterization, and applications

      JOURNAL OF ELECTROANALYTICAL CHEMISTRY
    3. Chiang, KN; Yuan, CA
      An overview of solder bump shape prediction algorithms with validations

      IEEE TRANSACTIONS ON ADVANCED PACKAGING
    4. Larson, DJ; Wissman, BD; Martens, RL; Viellieux, RJ; Kelly, TF; Gribb, TT; Erskine, HF; Tabat, N
      Advances in atom probe specimen fabrication from planar multilayer thin film structures

      MICROSCOPY AND MICROANALYSIS
    5. Olivier, M; Rochat, N; Chabli, A; Lefeuvre, G; Conne, F
      Multiple internal reflection spectroscopy: a sensitive non-destructive probe for interfaces and nanometric layers

      MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
    6. Huth, S; Breitenstein, O; Lambert, U; Huber, A
      Imaging of the lateral GOI-defect distribution in silicon MOS wafers with lock-in IR-thermography

      MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
    7. Lee, DK; Hwang, DH; Lee, SH; Mun, YH; Lee, BY; Yoo, HD
      The study on the radial distribution of delta [Oi] in heavily doped Si wafer using X-ray diffraction

      MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
    8. Rousseau, K; Rouviere, JL; Fournel, F; Moriceau, H
      Structural characterization of ultra-thin (001) silicon films bonded onto (001) silicon wafers: a transmission electron microscopy study

      MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
    9. Fastenau, JM; Liu, WK; Fang, XM; Lubyshev, DI; Pelzel, RI; Yurasits, TR; Stewart, TR; Lee, JH; Li, SS; Tidrow, MZ
      Commercial production of QWIP wafers by molecular beam epitaxy

      INFRARED PHYSICS & TECHNOLOGY
    10. Park, CB; Hong, SM; Jung, JP; Kang, CS; Shin, YE
      A study on the fluxless soldering of Si-wafer/glass substrate using Sn-3.5mass%Ag and Sn-37 mass%Pb solder

      MATERIALS TRANSACTIONS
    11. Shen, SC; Pan, CT; Chou, HP; Chou, MC
      Batch assembly micro-ball lens array for Si-based optical coupling platform in free space

      OPTICAL REVIEW
    12. Masi, M
      Multiscale approach to material synthesis by gas phase deposition

      JOURNAL DE PHYSIQUE IV
    13. Sato, T; Yokoyama, H; Ohya, H; Kamada, H
      Imaging of electrically detected magnetic resonance of a silicon wafer

      JOURNAL OF MAGNETIC RESONANCE
    14. Karim, A; Piprek, J; Abraham, P; Lofgreen, D; Chiu, YJ; Bowers, JE
      1.55-mu m vertical-cavity laser arrays for wavelength-division multiplexing

      IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
    15. Yang, TH; Su, CT; Feng, YC
      In search of a product mix for semiconductor wafer fabrication facilities by a combined simulation/neural network approach

      INTERNATIONAL JOURNAL OF INDUSTRIAL ENGINEERING-THEORY APPLICATIONS AND PRACTICE
    16. Lin, CA; Jan, YK
      Control system design for a rapid thermal processing system

      IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY
    17. Rusu, C; van't Oever, R; de Boer, MJ; Jansen, HV; Berenschot, JW; Bennink, ML; Kanger, JS; de Grooth, BG; Elwenspoek, M; Greve, J; Brugger, J; van den Berg, A
      Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers

      JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
    18. Bishop, WL; Summers, DM; Lichtenberger, AW
      Precision techniques for whole wafer dicing and thinning of superconducting mixer circuits

      IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
    19. Lee, JM; Watkins, KG; Steen, WM
      Surface cleaning of silicon wafer by laser sparking

      JOURNAL OF LASER APPLICATIONS
    20. Kumar, S; Kumar, PR
      Queueing network models in the design and analysis of semiconductor wafer fabs

      IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
    21. Jeng, MD; Xie, XL
      Modeling and analysis of semiconductor manufacturing systems with degradedbehavior using Petri nets and siphons

      IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
    22. Kim, YD; Kim, JG; Kim, HU
      Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates

      IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
    23. Hsieh, BW; Chen, CH; Chang, SC
      Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation

      IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
    24. Chen, JH; Fu, LC; Lin, MH; Huang, AC
      Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication

      IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
    25. Ohiso, Y; Okamoto, H; Iga, R; Kishi, K; Tateno, K; Amano, C
      High performance of 1.55-mu m buried-heterostructure vertical-cavity surface-emitting lasers

      IEEE PHOTONICS TECHNOLOGY LETTERS
    26. Raburn, M; Liu, B; Okuno, Y; Bowers, JE
      InP-InGaAsP wafer-bonded vertically coupled X-crossing multiple channel optical add-drop multiplexer

      IEEE PHOTONICS TECHNOLOGY LETTERS
    27. Lin, CK; Dapkus, PD
      Uniform wafer-bonded oxide-confined bottom-emitting 850-nm VCSEL arrays onsapphire substrates

      IEEE PHOTONICS TECHNOLOGY LETTERS
    28. Black, KA; Bjorlin, ES; Piprek, J; Hu, EL; Bowers, JE
      Small-signal frequency response of long-wavelength vertical-cavity lasers

      IEEE PHOTONICS TECHNOLOGY LETTERS
    29. Wang, DG; Zhang, SW; Gao, ML
      Nano-scratch study of molecular deposition (MD) films on silicon wafer using nanoindentation

      SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY
    30. Wang, TK; Wang, MY; Ko, FH; Tseng, CL
      Characterization and modeling of the metal diffusion from deep ultravioletphotoresist and silicon-based substrate

      APPLIED RADIATION AND ISOTOPES
    31. Jonsson, K; Kohler, J; Hedlund, C; Stenmark, L
      Oxygen plasma wafer bonding evaluated by the Weibull fracture probability method

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    32. Lee, JH; You, SJ; Park, SC
      A new intelligent SOFM-based sampling plan for advanced process control

      EXPERT SYSTEMS WITH APPLICATIONS
    33. Karabaliev, M; Kochev, V
      Probing the "interfacial" and "bulk" characteristics of solid-supported thin liquid films

      MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS
    34. Ohtsuka, H; Sakamoto, M; Koyama, M; Muramatsu, S; Yazawa, Y; Warabisako, T; Abe, T; Saitoh, T
      Effect of light degradation on bifacial Si solar cells

      SOLAR ENERGY MATERIALS AND SOLAR CELLS
    35. Kerst, U; Muller, B; Nell, ME; Wagemann, HG
      Monolithic series-interconnection for a thin film silicon solar cell

      SOLAR ENERGY MATERIALS AND SOLAR CELLS
    36. Tachibana, T; Ando, Y; Watanabe, A; Nishibayashi, Y; Kobashi, K; Hirao, T; Oura, K
      Diamond films grown by a 60-kW microwave plasma chemical vapor deposition system

      DIAMOND AND RELATED MATERIALS
    37. Kobayashi, K; Suzuki, H
      A sampling mechanism employing the phase transition of a gel and its application to a micro analysis system imitating a mosquito

      SENSORS AND ACTUATORS B-CHEMICAL
    38. Seyama, M; Sugimoto, I; Katoh, T
      An exchangeable Si wafer internal reflection element for FT-IR measurementof water sample

      SENSORS AND ACTUATORS B-CHEMICAL
    39. Calvo, V; Sotta, D; Ulmer, H; Hadji, E; Magnea, N; Dumont, F; Moriceau, H; Hernandez, C; Campidelli, Y
      Luminescence of silicon thin film and SiGe multiple quantum wells realizedon SOI

      OPTICAL MATERIALS
    40. Wild, MJ; Gillner, A; Poprawe, R
      Locally selective bonding of silicon and glass with laser

      SENSORS AND ACTUATORS A-PHYSICAL
    41. Weinert, A; Amirfeiz, P; Bengtsson, S
      Plasma assisted room temperature bonding for MST

      SENSORS AND ACTUATORS A-PHYSICAL
    42. Niklaus, F; Andersson, H; Enoksson, P; Stemme, G
      Low temperature full wafer adhesive bonding of structured wafers

      SENSORS AND ACTUATORS A-PHYSICAL
    43. Chiao, M; Lin, LW
      Hermetic wafer bonding based on rapid thermal processing

      SENSORS AND ACTUATORS A-PHYSICAL
    44. Tan, CM; Yeo, KNC
      A reliability statistics perspective on the pitfalls of standard wafer-level electromigration accelerated test (SWEAT)

      JOURNAL OF ELECTRONIC TESTING-THEORY AND APPLICATIONS
    45. Tong, QY
      Wafer bonding for integrated materials

      MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
    46. Pasquariello, D; Camacho, M; Hjort, K; Dozsa, L; Szentpali, B
      Evaluation of InP-to-silicon heterobonding

      MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
    47. Yasunaga, M; Yoshihara, I; Kim, JH
      The evolutionary algorithm-based reasoning system

      IEICE TRANSACTIONS ON INFORMATION AND SYSTEMS
    48. Nakai, I; Terada, Y; Itou, M; Sakurai, Y
      Use of highly energetic (116 keV) synchrotron radiation for X-ray fluorescence analysis of trace rare-earth and heavy elements

      JOURNAL OF SYNCHROTRON RADIATION
    49. Suzuki, E; Matsuda, H; Chiba, T; Mori, A
      New microcharacters for wafer identification

      IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
    50. Shan, L; Zhou, CH; Danyluk, S
      Mechanical interactions and their effects on chemical mechanical polishing

      IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
    51. Acharya, N; Kirtikar, V; Shooshtarian, S; Doan, H; Timans, PJ; Balakrishnan, KS; Knutson, KL
      Uniformity optimization techniques for rapid thermal processing systems

      IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
    52. Lin, S; Chu, HS
      Thermal uniformity of 12-in silicon wafer in linearly ramped-temperature transient rapid thermal processing

      IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
    53. Chien, CF; Hsu, SC; Deng, JF
      A cutting algorithm for optimizing the wafer exposure pattern

      IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
    54. Pahk, HJ; Ahn, WJ
      A new method of noncontact measurement for 3D micro pattern in semiconductor wafer: implementing a new optical probe

      INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
    55. Noda, S
      Two- and three-dimensional photonic crystals in III-V semiconductors

      MRS BULLETIN
    56. Liu, ZX; DeVoe, DL
      Micromechanism fabrication using silicon fusion bonding

      ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING
    57. Takenaka, M; Yamada, Y; Yabuki, M; Nakamura, S; Kozuka, S
      Determination of the ultratrace metallic impurities distribution in silicon wafers by sub-area chemical etching/microflow neblizer-ICP-MS

      BUNSEKI KAGAKU
    58. Yamada, Y; Tachibe, T; Shimazaki, A; Takanaka, M; Kozuka, S
      Determination of ultratrace phosphorus and titanium on silicon wafer surface by high resolution ICP-MS

      BUNSEKI KAGAKU
    59. Kondo, K; Sekiya, Y; Fukui, K; Tanaka, Z
      Shape evolution of high aspect ratio copper bumps used for wafer level CSP

      KAGAKU KOGAKU RONBUNSHU
    60. Lu, SY; Tong, HS; Chen, WC; Liu, TJ
      Reduction of ultra-pure water usage in wafer rinsing process via sequential compensatory strategies

      JOURNAL OF THE CHINESE INSTITUTE OF CHEMICAL ENGINEERS
    61. Horng, RH; Wuu, DS; Seieh, CH; Peng, WC; Huang, MF; Tsai, SJ; Liu, JS
      Wafer bonding of 50-mm-diameter mirror substrates to AlGaInP light-emitting diode wafers

      JOURNAL OF ELECTRONIC MATERIALS
    62. Yun, CH; Cheung, NW
      Thermal and mechanical separations of silicon layers from hydrogen pattern-implanted wafers

      JOURNAL OF ELECTRONIC MATERIALS
    63. Vilela, MF; Anselm, KA; Sooriar, N; Johnson, JL; Lin, CH; Brown, GJ; Mahalingam, K; Saxler, A; Szmulowicz, F
      InAs/InGaSb photodetectors grown on GaAs bonded substrates

      JOURNAL OF ELECTRONIC MATERIALS
    64. Moran, PD; Kuech, TF
      Kinetics of strain relaxation in semiconductor films grown on borosilicateglass-bonded substrates

      JOURNAL OF ELECTRONIC MATERIALS
    65. Friedland, KJ; Riedel, A; Kostial, H; Horicke, M; Hey, R; Ploog, KH
      High mobility electron heterostructure wafer fused onto LiNbO3

      JOURNAL OF ELECTRONIC MATERIALS
    66. Aspar, B; Moriceau, H; Jalaguier, E; Lagahe, C; Soubie, A; Biasse, B; Papon, AM; Claverie, A; Grisolia, J; Benassayag, G; Letertre, F; Rayssac, O; Barge, T; Maleville, C; Ghyselen, B
      The generic nature of the Smart-Cut((R)) process for thin film transfer

      JOURNAL OF ELECTRONIC MATERIALS
    67. Colinge, C; Roberds, B; Doyle, B
      Silicon layer transfer using wafer bonding and debonding

      JOURNAL OF ELECTRONIC MATERIALS
    68. Chen, KN; Fan, A; Reif, R
      Microstructure examination of copper wafer bonding

      JOURNAL OF ELECTRONIC MATERIALS
    69. Fu, GH; Chandra, A
      A model for wafer scale variation of removal rate in chemical mechanical polishing based on elastic pad deformation

      JOURNAL OF ELECTRONIC MATERIALS
    70. Quitoriano, N; Wong, WS; Tsakalakos, L; Cho, Y; Sands, T
      Kinetics of the Pd/In thin-film bilaver reaction: Implications for transient-liquid-phase wafer bonding

      JOURNAL OF ELECTRONIC MATERIALS
    71. Dabbas, RM; Chen, HN; Fowler, JW; Shunk, D
      A combined dispatching criteria approach to scheduling semiconductor manufacturing systems

      COMPUTERS & INDUSTRIAL ENGINEERING
    72. Paraskevopoulos, A; Hensel, HJ; Schelhase, S; Frahm, J; Kubler, J; Denker, A; Gubenko, A; Portnoi, EL
      'On-wafer' surface implanted high power, picosecond pulse InGaAsP/InP (lambda=1.53-1.55 mu m) laser diodes

      OPTICAL AND QUANTUM ELECTRONICS
    73. Dessein, K; Kumar, PSA; Lagae, L; De Boeck, J; Delaey, L; Borghs, G
      Improvement of the transfer coefficient of GaAs/Si spin-valve transistors

      JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
    74. Sreejith, PS; Udupa, G; Noor, YBM; Ngoi, BKA
      Recent advances in machining of silicon wafers for semiconductor applications

      INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
    75. Deepak; Gaur, A
      Role of temperature gradients in blanket tungsten for microelectronic contacts

      SEMICONDUCTOR SCIENCE AND TECHNOLOGY
    76. So, JH; Bae, SH; Yang, SM; Kim, DH
      Preparations of silica slurry for wafer polishing via controlled growth ofcommercial silica seeds

      KOREAN JOURNAL OF CHEMICAL ENGINEERING
    77. Chung, HY; Kim, KS; Cho, HY; Lee, BY; Yoo, HD; Lee, SH
      Evaluation of citric acid added cleaning solution for removal of metallic contaminants on Si wafer surface

      KOREAN JOURNAL OF CHEMICAL ENGINEERING
    78. Chae, HB; Park, H; Hong, JS; Han, YJ; Joo, Y; Baik, YJ; Lee, JK; Lee, SW
      Thermal diffusivity of diamond wafers deposited with multicathode dc plasma-assisted CVD

      INTERNATIONAL JOURNAL OF THERMOPHYSICS
    79. Suzuki, T
      Oxygen partial pressure dependence of suppressing oxidation-induced stacking fault generation in argon ambient annealing including oxygen and HCl

      APPLIED SURFACE SCIENCE
    80. Akimoto, T; Arai, S; Hara, K; Nakayama, T; Ikegami, Y; Iwata, Y; Kobayashi, H; Kohriki, T; Kondo, T; Nakano, I; Ohsugi, T; Shimojima, M; Shinma, S; Takashima, R; Terada, S; Ujiie, N; Unno, Y; Yamamoto, K; Yamamura, K
      Characteristics of irradiated silicon microstrip detectors with < 1 0 0 > and < 1 1 1 > substrates

      NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
    81. Tsoukalas, D; Skarlatos, D; Stoemenos, J
      Investigation of the influence of a dislocation loop layer on interstitialkinetics during surface oxidation of silicon

      NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
    82. Bromberg, LE; Buxton, DK; Friden, PM
      Novel periodontal drug delivery system for treatment of periodontitis

      JOURNAL OF CONTROLLED RELEASE
    83. Hall, S; Lamb, AC; Bain, M; Armstrong, BM; Gamble, H; El Mubarek, HAW; Ashburn, P
      SiGeHBTs on bonded wafer substrates

      MICROELECTRONIC ENGINEERING
    84. Lagnado, I; de la Houssaye, PR
      Integration of Si and SiGe with Al2O3 (sapphire)

      MICROELECTRONIC ENGINEERING
    85. Une, A; Kai, Y; Mochida, M; Matsui, S
      Flattening ability of a vacuum pin chuck around the periphery of a processed wafer

      MICROELECTRONIC ENGINEERING
    86. Kaesmaier, R; Ehrmann, A; Loschner, H
      Ion projection lithography: status of tool and mask developments

      MICROELECTRONIC ENGINEERING
    87. Damm, C; Peschel, T; Risse, S; Kirschstein, UC
      Wafer stage assembly for ion projection lithography

      MICROELECTRONIC ENGINEERING
    88. Beckert, E; Hoffmann, A; Saffert, E
      Development of a vertical wafer stage for high-vacuum applications

      MICROELECTRONIC ENGINEERING
    89. Bensahel, D; Vandelle, B; Morin, C; Martins, J; Galvier, J; Vialletelle, P; Henry, M
      Front-end, single-wafer diffusion processing for advanced 300-mm fabrication lines

      MICROELECTRONIC ENGINEERING
    90. Imai, M; Mayusumi, M; Inoue, K; Nakahara, S; Gima, S
      Issues for the larger diameter epitaxial wafer

      MICROELECTRONIC ENGINEERING
    91. Fischer, A; Richter, H; Shalynin, A; Krottenthaler, P; Obermeier, G; Lambert, U; Wahlich, R
      Upper yield point of large diameter silicon

      MICROELECTRONIC ENGINEERING
    92. Wang, J; Tu, H; Zhou, Q; Zhu, W; Liu, A
      In situ Raman spectroscopy study on silicon surface in NH4OH/H2O2 and HCl/H2O2 aqueous solutions

      MICROELECTRONIC ENGINEERING
    93. Shin, NS; Chang, CH; Koo, YM; Padmore, H
      Synchrotron radiation excited total reflection X-ray fluorescence quantitative analysis of Si wafer by absolute fluorescence intensity calculation

      MATERIALS LETTERS
    94. Dabbas, RM; Chen, HN
      Mining semiconductor manufacturing data for productivity improvement - an integrated relational database approach

      COMPUTERS IN INDUSTRY
    95. Haedrich, RL; Merrett, NR; O'Dea, NR
      Can ecological knowledge catch up with deep-water fishing? a North Atlantic perspective

      FISHERIES RESEARCH
    96. Choi, BJ; Sreenivasan, SV; Johnson, S; Colburn, M; Wilson, CG
      Design of orientation stages for step and flash imprint lithography

      PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISIONENGINEERING AND NANOTECHNOLOGY
    97. Kersten, H; Deutsch, H; Steffen, H; Kroesen, GMW; Hippler, R
      The energy balance at substrate surfaces during plasma processing

      VACUUM
    98. Karasawa, M; Masuda, A; Ishibashi, K; Matsumura, H
      Development of Cat-CVD apparatus - a method to control wafer temperatures under thermal influence of heated catalyzer

      THIN SOLID FILMS
    99. Werner, JH; Dassow, R; Rinke, TJ; Kohler, JR; Bergmann, RB
      From polycrystalline to single crystalline silicon on glass

      THIN SOLID FILMS
    100. Johansson, M; Berg, J; Bengtsson, S
      High frequency properties of silicon-on-insulator and novel depleted silicon materials

      SOLID-STATE ELECTRONICS


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Documento generato il 20/06/13 alle ore 10:51:21