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Experimental study on input and bottleneck scheduling for a semiconductor fabrication line
IIE TRANSACTIONS
Electrochemically-actuated mercury valve for flow rate and direction control: design, characterization, and applications
JOURNAL OF ELECTROANALYTICAL CHEMISTRY
An overview of solder bump shape prediction algorithms with validations
IEEE TRANSACTIONS ON ADVANCED PACKAGING
Advances in atom probe specimen fabrication from planar multilayer thin film structures
MICROSCOPY AND MICROANALYSIS
Multiple internal reflection spectroscopy: a sensitive non-destructive probe for interfaces and nanometric layers
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Imaging of the lateral GOI-defect distribution in silicon MOS wafers with lock-in IR-thermography
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
The study on the radial distribution of delta [Oi] in heavily doped Si wafer using X-ray diffraction
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Structural characterization of ultra-thin (001) silicon films bonded onto (001) silicon wafers: a transmission electron microscopy study
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Commercial production of QWIP wafers by molecular beam epitaxy
INFRARED PHYSICS & TECHNOLOGY
A study on the fluxless soldering of Si-wafer/glass substrate using Sn-3.5mass%Ag and Sn-37 mass%Pb solder
MATERIALS TRANSACTIONS
Batch assembly micro-ball lens array for Si-based optical coupling platform in free space
OPTICAL REVIEW
Multiscale approach to material synthesis by gas phase deposition
JOURNAL DE PHYSIQUE IV
Imaging of electrically detected magnetic resonance of a silicon wafer
JOURNAL OF MAGNETIC RESONANCE
1.55-mu m vertical-cavity laser arrays for wavelength-division multiplexing
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
In search of a product mix for semiconductor wafer fabrication facilities by a combined simulation/neural network approach
INTERNATIONAL JOURNAL OF INDUSTRIAL ENGINEERING-THEORY APPLICATIONS AND PRACTICE
Control system design for a rapid thermal processing system
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY
Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Precision techniques for whole wafer dicing and thinning of superconducting mixer circuits
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
Surface cleaning of silicon wafer by laser sparking
JOURNAL OF LASER APPLICATIONS
Queueing network models in the design and analysis of semiconductor wafer fabs
IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
Modeling and analysis of semiconductor manufacturing systems with degradedbehavior using Petri nets and siphons
IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates
IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation
IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication
IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION
High performance of 1.55-mu m buried-heterostructure vertical-cavity surface-emitting lasers
IEEE PHOTONICS TECHNOLOGY LETTERS
InP-InGaAsP wafer-bonded vertically coupled X-crossing multiple channel optical add-drop multiplexer
IEEE PHOTONICS TECHNOLOGY LETTERS
Uniform wafer-bonded oxide-confined bottom-emitting 850-nm VCSEL arrays onsapphire substrates
IEEE PHOTONICS TECHNOLOGY LETTERS
Small-signal frequency response of long-wavelength vertical-cavity lasers
IEEE PHOTONICS TECHNOLOGY LETTERS
Nano-scratch study of molecular deposition (MD) films on silicon wafer using nanoindentation
SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY
Characterization and modeling of the metal diffusion from deep ultravioletphotoresist and silicon-based substrate
APPLIED RADIATION AND ISOTOPES
Oxygen plasma wafer bonding evaluated by the Weibull fracture probability method
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
A new intelligent SOFM-based sampling plan for advanced process control
EXPERT SYSTEMS WITH APPLICATIONS
Probing the "interfacial" and "bulk" characteristics of solid-supported thin liquid films
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS
Effect of light degradation on bifacial Si solar cells
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Monolithic series-interconnection for a thin film silicon solar cell
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Diamond films grown by a 60-kW microwave plasma chemical vapor deposition system
DIAMOND AND RELATED MATERIALS
A sampling mechanism employing the phase transition of a gel and its application to a micro analysis system imitating a mosquito
SENSORS AND ACTUATORS B-CHEMICAL
An exchangeable Si wafer internal reflection element for FT-IR measurementof water sample
SENSORS AND ACTUATORS B-CHEMICAL
Luminescence of silicon thin film and SiGe multiple quantum wells realizedon SOI
OPTICAL MATERIALS
Locally selective bonding of silicon and glass with laser
SENSORS AND ACTUATORS A-PHYSICAL
Plasma assisted room temperature bonding for MST
SENSORS AND ACTUATORS A-PHYSICAL
Low temperature full wafer adhesive bonding of structured wafers
SENSORS AND ACTUATORS A-PHYSICAL
Hermetic wafer bonding based on rapid thermal processing
SENSORS AND ACTUATORS A-PHYSICAL
A reliability statistics perspective on the pitfalls of standard wafer-level electromigration accelerated test (SWEAT)
JOURNAL OF ELECTRONIC TESTING-THEORY AND APPLICATIONS
Wafer bonding for integrated materials
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
Evaluation of InP-to-silicon heterobonding
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
The evolutionary algorithm-based reasoning system
IEICE TRANSACTIONS ON INFORMATION AND SYSTEMS
Use of highly energetic (116 keV) synchrotron radiation for X-ray fluorescence analysis of trace rare-earth and heavy elements
JOURNAL OF SYNCHROTRON RADIATION
New microcharacters for wafer identification
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Mechanical interactions and their effects on chemical mechanical polishing
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Uniformity optimization techniques for rapid thermal processing systems
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Thermal uniformity of 12-in silicon wafer in linearly ramped-temperature transient rapid thermal processing
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
A cutting algorithm for optimizing the wafer exposure pattern
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
A new method of noncontact measurement for 3D micro pattern in semiconductor wafer: implementing a new optical probe
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
Two- and three-dimensional photonic crystals in III-V semiconductors
MRS BULLETIN
Micromechanism fabrication using silicon fusion bonding
ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING
Determination of the ultratrace metallic impurities distribution in silicon wafers by sub-area chemical etching/microflow neblizer-ICP-MS
BUNSEKI KAGAKU
Determination of ultratrace phosphorus and titanium on silicon wafer surface by high resolution ICP-MS
BUNSEKI KAGAKU
Shape evolution of high aspect ratio copper bumps used for wafer level CSP
KAGAKU KOGAKU RONBUNSHU
Reduction of ultra-pure water usage in wafer rinsing process via sequential compensatory strategies
JOURNAL OF THE CHINESE INSTITUTE OF CHEMICAL ENGINEERS
Wafer bonding of 50-mm-diameter mirror substrates to AlGaInP light-emitting diode wafers
JOURNAL OF ELECTRONIC MATERIALS
Thermal and mechanical separations of silicon layers from hydrogen pattern-implanted wafers
JOURNAL OF ELECTRONIC MATERIALS
InAs/InGaSb photodetectors grown on GaAs bonded substrates
JOURNAL OF ELECTRONIC MATERIALS
Kinetics of strain relaxation in semiconductor films grown on borosilicateglass-bonded substrates
JOURNAL OF ELECTRONIC MATERIALS
High mobility electron heterostructure wafer fused onto LiNbO3
JOURNAL OF ELECTRONIC MATERIALS
The generic nature of the Smart-Cut((R)) process for thin film transfer
JOURNAL OF ELECTRONIC MATERIALS
Silicon layer transfer using wafer bonding and debonding
JOURNAL OF ELECTRONIC MATERIALS
Microstructure examination of copper wafer bonding
JOURNAL OF ELECTRONIC MATERIALS
A model for wafer scale variation of removal rate in chemical mechanical polishing based on elastic pad deformation
JOURNAL OF ELECTRONIC MATERIALS
Kinetics of the Pd/In thin-film bilaver reaction: Implications for transient-liquid-phase wafer bonding
JOURNAL OF ELECTRONIC MATERIALS
A combined dispatching criteria approach to scheduling semiconductor manufacturing systems
COMPUTERS & INDUSTRIAL ENGINEERING
'On-wafer' surface implanted high power, picosecond pulse InGaAsP/InP (lambda=1.53-1.55 mu m) laser diodes
OPTICAL AND QUANTUM ELECTRONICS
Improvement of the transfer coefficient of GaAs/Si spin-valve transistors
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
Recent advances in machining of silicon wafers for semiconductor applications
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Role of temperature gradients in blanket tungsten for microelectronic contacts
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Preparations of silica slurry for wafer polishing via controlled growth ofcommercial silica seeds
KOREAN JOURNAL OF CHEMICAL ENGINEERING
Evaluation of citric acid added cleaning solution for removal of metallic contaminants on Si wafer surface
KOREAN JOURNAL OF CHEMICAL ENGINEERING
Thermal diffusivity of diamond wafers deposited with multicathode dc plasma-assisted CVD
INTERNATIONAL JOURNAL OF THERMOPHYSICS
Oxygen partial pressure dependence of suppressing oxidation-induced stacking fault generation in argon ambient annealing including oxygen and HCl
APPLIED SURFACE SCIENCE
Characteristics of irradiated silicon microstrip detectors with < 1 0 0 > and < 1 1 1 > substrates
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
Investigation of the influence of a dislocation loop layer on interstitialkinetics during surface oxidation of silicon
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Novel periodontal drug delivery system for treatment of periodontitis
JOURNAL OF CONTROLLED RELEASE
SiGeHBTs on bonded wafer substrates
MICROELECTRONIC ENGINEERING
Integration of Si and SiGe with Al2O3 (sapphire)
MICROELECTRONIC ENGINEERING
Flattening ability of a vacuum pin chuck around the periphery of a processed wafer
MICROELECTRONIC ENGINEERING
Ion projection lithography: status of tool and mask developments
MICROELECTRONIC ENGINEERING
Wafer stage assembly for ion projection lithography
MICROELECTRONIC ENGINEERING
Development of a vertical wafer stage for high-vacuum applications
MICROELECTRONIC ENGINEERING
Front-end, single-wafer diffusion processing for advanced 300-mm fabrication lines
MICROELECTRONIC ENGINEERING
Issues for the larger diameter epitaxial wafer
MICROELECTRONIC ENGINEERING
Upper yield point of large diameter silicon
MICROELECTRONIC ENGINEERING
In situ Raman spectroscopy study on silicon surface in NH4OH/H2O2 and HCl/H2O2 aqueous solutions
MICROELECTRONIC ENGINEERING
Synchrotron radiation excited total reflection X-ray fluorescence quantitative analysis of Si wafer by absolute fluorescence intensity calculation
MATERIALS LETTERS
Mining semiconductor manufacturing data for productivity improvement - an integrated relational database approach
COMPUTERS IN INDUSTRY
Can ecological knowledge catch up with deep-water fishing? a North Atlantic perspective
FISHERIES RESEARCH
Design of orientation stages for step and flash imprint lithography
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISIONENGINEERING AND NANOTECHNOLOGY
The energy balance at substrate surfaces during plasma processing
VACUUM
Development of Cat-CVD apparatus - a method to control wafer temperatures under thermal influence of heated catalyzer
THIN SOLID FILMS
From polycrystalline to single crystalline silicon on glass
THIN SOLID FILMS
High frequency properties of silicon-on-insulator and novel depleted silicon materials
SOLID-STATE ELECTRONICS